moscap2d.geo

Mesh.CharacteristicLengthExtendFromBoundary=1; /* don't extend from boundary points */
Mesh.Algorithm=5; /*Delaunay*/
Mesh.RandomFactor=1e-7; /*perturbation*/
/*Mesh.Algorithm=6;*/ /*Frontal*/
Geometry.ScalingFactor=1.0e-7;
Mesh.CharacteristicLengthMax = 2.5e-5; /*maximum characteristic length */

w=1;
tox=3;
tsi=60;
trf=tox+10; /*thickness of refinement area*/
tcl0=0.5; /*cl in ox*/
tcl1=0.05; /*cl near interface*/
tcl2=0.5;
tcl3=0.5; /*cl near backside */


Point(1) = {-w/2.0,  -tox, 0, tcl0};
Point(2) = { 0,      -tox, 0, tcl0};
Point(3) = { w/2.0,  -tox, 0, tcl0};
Point(4) = {-w/2.0,    0.0, 0, tcl1};
Point(5) = { 0,        0.0, 0, tcl1};
Point(6) = { w/2.0,    0.0, 0, tcl1};
Point(7) = {-w/2.0,   trf, 0, tcl2};
Point(8) = { w/2.0,   trf, 0, tcl2};
Point(9) =  {-w/2.0,  tsi, 0, tcl3};
Point(11) = { w/2.0,  tsi, 0, tcl3};
Line(1) = {1, 2};
Line(2) = {2, 3};
Line(3) = {1, 4};
Line(4) = {4, 5};
Line(5) = {5, 6};
Line(6) = {3, 6};
Line(7) = {4, 7};
Line(8) = {6, 8};
Line(9) = {8, 11};
Line(10) = {11, 9};
Line(11) = {9, 7};
Physical Line("gate") = {1, 2};
Physical Line("sub") = {10};
Physical Line("interface") = {4, 5};
Line Loop(14) = {1, 2, 6, -5, -4, -3};
Plane Surface(15) = {14};
Line Loop(16) = {7, -11, -10, -9, -8, -5, -4};
Plane Surface(17) = {16};
Physical Surface("oxide") = {15};
Physical Surface("silicon") = {17};